Journal of micro/nanolithography, MEMS, and MOEMS : JM3
Published by SPIE - International Society for Optical Engineering
United States · Advancements in Photolithography Techniques
Journal at a glance
- ISSN
- 1932-5150, 1932-5134 (electronic)
- Publisher
- SPIE - International Society for Optical Engineering
- Country
- United States
- Language
- en
Also known as: J Micro Nanolithogr MEMS MOEMS (Abbreviation), JM3 (Alternate title), J. Micro/Nanolith. MEMS MOEMS (Alternate title), Journal of Microlithography Microfabrication and Microsystems (Alternate title), JM3 (Online) (Alternate title)
Metrics
| Metric | Value | Year | Source |
|---|
| DOIs registered (Crossref) | 1668 | 2026 | Crossref |
| DOIs, current year (Crossref) | 0 | 2026 | Crossref |
| Works (OpenAlex) | 1685 | 2026 | OpenAlex |
| h-index (OpenAlex) | 48 | 2026 | OpenAlex |
| 2-year mean citedness (OpenAlex) | 0 | 2026 | OpenAlex |
| Citations (OpenAlex) | 17884 | 2026 | OpenAlex |
| i10-index (OpenAlex) | 587 | 2026 | OpenAlex |
Subjects
- Advancements in Photolithography Techniques
- Nanofabrication and Lithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Optical Coatings and Gratings
- Electron and X-Ray Spectroscopy Techniques
- Advanced MEMS and NEMS Technologies
- Advanced Surface Polishing Techniques
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- Scanning electron microscopy — United States · — · Same subject: Advanced Surface Polishing Techniques, Same subject: Advancements in Photolithography Techniques, 3 shared subjects in total, Same country
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Sources: OpenAlex, NLM Catalog, Crossref · Last verified 2026-09-07