Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
Published by AVS through the American Institute of Physics,
United States · Semiconductor materials and devices
Journal at a glance
- ISSN
- 2166-2746, 2166-2754 (electronic)
- Publisher
- AVS through the American Institute of Physics,
- Country
- United States
- Language
- en
Also known as: J Vac Sci Technol B Nanotechnol Microelectron (Abbreviation), Nanotechnology & microelectronics (Alternate title), Nanotechnology and microelectronics (Alternate title), JVST B, Nanotechnology & microelectronics (Alternate title), JVST B (Alternate title), Journal of vacuum science and technology. (Alternate title)
Metrics
| Metric | Value | Year | Source |
|---|
| h-index (OpenAlex) | 63 | 2026 | OpenAlex |
| i10-index (OpenAlex) | 1490 | 2026 | OpenAlex |
| DOIs registered (Crossref) | 4431 | 2026 | Crossref |
| DOIs, current year (Crossref) | 481 | 2026 | Crossref |
| Works (OpenAlex) | 4536 | 2026 | OpenAlex |
| Citations (OpenAlex) | 47116 | 2026 | OpenAlex |
| 2-year mean citedness (OpenAlex) | 2.096 | 2026 | OpenAlex |
Subjects
- Semiconductor materials and devices
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- GaN-based semiconductor devices and materials
- Nanofabrication and Lithography Techniques
- ZnO doping and properties
- Ion-surface interactions and analysis
Similar journals
- Microelectronic engineering — Kingdom of the Netherlands · — · Same subject: Advancements in Photolithography Techniques, Same subject: Integrated Circuits and Semiconductor Failure Analysis, 4 shared subjects in total
- Applied physics letters — United States · — · Same subject: GaN-based semiconductor devices and materials, Same subject: Semiconductor materials and devices, 3 shared subjects in total, Same country
- AIP advances — United States · Open access · Same subject: GaN-based semiconductor devices and materials, Same subject: Semiconductor materials and devices, 3 shared subjects in total, Same country
- Surface and interface analysis : SIA — United States · — · Same subject: Integrated Circuits and Semiconductor Failure Analysis, Same subject: Ion-surface interactions and analysis, 3 shared subjects in total, Same country
- ECS journal of solid state science and technology : JSS — United States · — · Same subject: GaN-based semiconductor devices and materials, Same subject: Semiconductor materials and devices, 3 shared subjects in total, Same country
- Journal of micro/nanolithography, MEMS, and MOEMS : JM3 — United States · — · Same subject: Advancements in Photolithography Techniques, Same subject: Integrated Circuits and Semiconductor Failure Analysis, 3 shared subjects in total, Same country
Sources: OpenAlex, NLM Catalog, Crossref · Last verified 2026-09-07
Journal homepage