Microelectronic engineering
Published by Elsevier
Kingdom of the Netherlands · Semiconductor materials and devices
Journal at a glance
- ISSN
- 0167-9317, 1873-5568 (electronic)
- Publisher
- Elsevier
- Country
- Kingdom of the Netherlands
- Language
- en
Also known as: Microelectron Eng (Abbreviation)
Metrics
| Metric | Value | Year | Source |
|---|
| DOIs registered (Crossref) | 13708 | 2026 | Crossref |
| Works (OpenAlex) | 14114 | 2026 | OpenAlex |
| h-index (OpenAlex) | 122 | 2026 | OpenAlex |
| i10-index (OpenAlex) | 5883 | 2026 | OpenAlex |
| DOIs, current year (Crossref) | 254 | 2026 | Crossref |
| Citations (OpenAlex) | 205379 | 2026 | OpenAlex |
| 2-year mean citedness (OpenAlex) | 3.35 | 2026 | OpenAlex |
Subjects
- Semiconductor materials and devices
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Advancements in Semiconductor Devices and Circuit Design
- Nanofabrication and Lithography Techniques
- Advanced Surface Polishing Techniques
- Copper Interconnects and Reliability
Similar journals
- Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B — United States · — · Same subject: Advancements in Photolithography Techniques, Same subject: Integrated Circuits and Semiconductor Failure Analysis, 4 shared subjects in total
- Journal of micro/nanolithography, MEMS, and MOEMS : JM3 — United States · — · Same subject: Advanced Surface Polishing Techniques, Same subject: Advancements in Photolithography Techniques, 4 shared subjects in total
- Active and Passive Electronic Components — Kingdom of the Netherlands · Open access · Same subject: Advancements in Semiconductor Devices and Circuit Design, Same subject: Copper Interconnects and Reliability, 3 shared subjects in total, Same country
- Micro and nano engineering — Kingdom of the Netherlands · Open access · Same subject: Advancements in Photolithography Techniques, Same subject: Nanofabrication and Lithography Techniques, 3 shared subjects in total, Same country
- Microelectronics and reliability — United Kingdom · — · Same subject: Advancements in Semiconductor Devices and Circuit Design, Same subject: Integrated Circuits and Semiconductor Failure Analysis, 3 shared subjects in total
- Solid-state electronics — United Kingdom · — · Same subject: Advancements in Semiconductor Devices and Circuit Design, Same subject: Integrated Circuits and Semiconductor Failure Analysis, 3 shared subjects in total
Sources: OpenAlex, NLM Catalog, Crossref · Last verified 2026-09-06
Journal homepage