Microsystem technologies : sensors, actuators, systems integration
Published by Springer
Germany · Advanced MEMS and NEMS Technologies
Journal at a glance
- ISSN
- 0946-7076, 1432-1858 (electronic)
- Publisher
- Springer
- Country
- Germany
- Language
- en
Also known as: Microsyst Technol (Abbreviation), Sensors, actuators, systems integration (Alternate title), Micro- and nanosystems information storage and processing systems (Alternate title)
Metrics
| Metric | Value | Year | Source |
|---|
| DOIs registered (Crossref) | 6937 | 2026 | Crossref |
| DOIs, current year (Crossref) | 560 | 2026 | Crossref |
| Citations (OpenAlex) | 93144 | 2026 | OpenAlex |
| 2-year mean citedness (OpenAlex) | 2.815 | 2026 | OpenAlex |
| Works (OpenAlex) | 7145 | 2026 | OpenAlex |
| h-index (OpenAlex) | 84 | 2026 | OpenAlex |
| i10-index (OpenAlex) | 2881 | 2026 | OpenAlex |
Subjects
- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Acoustic Wave Resonator Technologies
- Microfluidic and Capillary Electrophoresis Applications
- Adhesion, Friction, and Surface Interactions
- Advanced Surface Polishing Techniques
- Nanofabrication and Lithography Techniques
Similar journals
- Journal of micromechanics and microengineering : structures, devices, and systems — United Kingdom · — · Same subject: Acoustic Wave Resonator Technologies, Same subject: Advanced MEMS and NEMS Technologies, 5 shared subjects in total
- Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems — United States · — · Same subject: Acoustic Wave Resonator Technologies, Same subject: Advanced MEMS and NEMS Technologies, 4 shared subjects in total
- Proceedings. IEEE International Conference on Micro Electro Mechanical Systems — United States · — · Same subject: Acoustic Wave Resonator Technologies, Same subject: Advanced MEMS and NEMS Technologies, 4 shared subjects in total
- Micro and nano systems letters — Germany · Open access · Same subject: Advanced MEMS and NEMS Technologies, Same subject: Mechanical and Optical Resonators, 3 shared subjects in total, Same country
- Sensors and actuators. A, Physical — Kingdom of the Netherlands · — · Same subject: Acoustic Wave Resonator Technologies, Same subject: Advanced MEMS and NEMS Technologies, 3 shared subjects in total
- Micromachines — Switzerland · Open access · Same subject: Advanced MEMS and NEMS Technologies, Same subject: Advanced Surface Polishing Techniques, 3 shared subjects in total
Sources: OpenAlex, NLM Catalog, Crossref · Last verified 2026-09-07
Journal homepage