Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Published by Published for the Society by the American Institute of Physics,
United States · Semiconductor materials and devices
Journal at a glance
- ISSN
- 0734-2101, 1520-8559 (electronic)
- Publisher
- Published for the Society by the American Institute of Physics,
- Country
- United States
- Language
- en
Also known as: J Vac Sci Technol A (Abbreviation), Journal of vacuum science & technology. A. Vacuum, surfaces, and films (Alternate title), Journal of vacuum science and technology. A, Vacuum, surfaces, and films (Alternate title), Vacuum, surfaces, and films (Alternate title), J. vac. sci. technol., A, Vac. surf. films (Alternate title), JVST A (Alternate title), Journal of vacuum science & technology. (Alternate title)
Metrics
| Metric | Value | Year | Source |
|---|
| h-index (OpenAlex) | 177 | 2026 | OpenAlex |
| DOIs registered (Crossref) | 18151 | 2026 | Crossref |
| DOIs, current year (Crossref) | 915 | 2026 | Crossref |
| Works (OpenAlex) | 18158 | 2026 | OpenAlex |
| Citations (OpenAlex) | 402705 | 2026 | OpenAlex |
| i10-index (OpenAlex) | 9629 | 2026 | OpenAlex |
| 2-year mean citedness (OpenAlex) | 2.63 | 2026 | OpenAlex |
Subjects
- Semiconductor materials and devices
- Metal and Thin Film Mechanics
- Plasma Diagnostics and Applications
- Ion-surface interactions and analysis
- Diamond and Carbon-based Materials Research
- Electron and X-Ray Spectroscopy Techniques
- Copper Interconnects and Reliability
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Sources: OpenAlex, NLM Catalog, Crossref · Last verified 2026-09-06